Preheat oven to 350ºF. Prepare pan with vegetable cooking spray.
In medium bowl, combine flour, baking soda and salt. In large bowl, beat butter and sugars with electric mixer until light and fluffy. Add vanilla and egg; mix well. Add flour mixture to butter mixture; mix well. Stir in chips. Press dough into pan cavities, filling 3/4 full.
Bake 9-10 minutes or until edges are golden brown. Cool 5 minutes in pan; remove and cool completely on cooling grid.